Qi Xie Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Qi Xie returned 6 record(s).

Number	Title
1	Ru thin film grown on TaN by plasma enhanced atomic layer deposition
2	Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
3	Texture of atomic layer deposited ruthenium
4	TaCN growth with PDMAT and H2/Ar plasma by plasma enhanced atomic layer deposition
5	Atomic layer deposition of titanium nitride from TDMAT precursor
6	Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma