Jan Musschoot Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jan Musschoot returned 9 record(s).

Number	Title
1	Diffusion barrier properties of TaN_x films prepared by plasma enhanced atomic layer deposition from PDMAT with N₂ or NH₃ plasma
2	Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
3	Ru thin film grown on TaN by plasma enhanced atomic layer deposition
4	Growth Kinetics and Crystallization Behavior of TiO₂ Films Prepared by Plasma Enhanced Atomic Layer Deposition
5	Texture of atomic layer deposited ruthenium
6	Atomic layer deposition of titanium nitride from TDMAT precursor
7	TaCN growth with PDMAT and H₂/Ar plasma by plasma enhanced atomic layer deposition
8	Conformality of Al₂O₃ and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
9	Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide