Ju Youn Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ju Youn Kim returned 8 record(s).

Number	Title
1	Characteristics and Compositional Variation of TiN Films Deposited by Remote PEALD on Contact Holes
2	Remote plasma enhanced atomic layer deposition of TiN thin films using metalorganic precursor
3	Deposition and Plasma Measurements of Zr-Oxide Films with Low Impurity Concentrations by Remote PEALD
4	Barrier Characteristics of TaN Films Deposited by Using the Remote Plasma Enhanced Atomic Layer Deposition Method
5	The Formation of an Almost Full Atomic Monolayer via Surface Modification by N₂O-Plasma in Atomic Layer Deposition of ZrO₂ Thin Films
6	Characteristics of TiN Films Deposited by Remote Plasma-Enhanced Atomic Layer Deposition Method
7	Remote Plasma-Enhanced Atomic-Layer Deposition of TiN by Using TDMAT with a NH₃ Plasma
8	Thermal Stability of ALD HfO₂ Thin Films and Interfacial Layers on the Oxynitride Underlayer Formed Using Remote Plasma