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Yangdo Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yangdo Kim returned 8 record(s).

NumberTitle
1Plasma-Enhanced Atomic-Layer Deposition of a HfO2 Gate Dielectric
2ZrO2 Gate Dielectric Deposited by Plasma-Enhanced Atomic Layer Deposition Method
3Barrier Characteristics of ZrN Films Deposited by Remote Plasma-Enhanced Atomic Layer Deposition Using Tetrakis(diethylamino)zirconium Precursor
4Barrier Characteristics of TaN Films Deposited by Using the Remote Plasma Enhanced Atomic Layer Deposition Method
5Characteristics of TiN Films Deposited by Remote Plasma-Enhanced Atomic Layer Deposition Method
6Remote plasma enhanced atomic layer deposition of TiN thin films using metalorganic precursor
7Characteristics of ZrO2 gate dielectric deposited using Zr(t –butoxide) and Zr(NEt2)4 precursors by plasma enhanced atomic layer deposition method
8Characteristics of Al2O3 Thin Films Deposited Using Dimethylaluminum Isopropoxide and Trimethylaluminum Precursors by the Plasma-Enhanced Atomic-Layer Deposition Method