Kevin J. Chen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kevin J. Chen returned 13 record(s).

Number	Title
1	Characterization of SiN_x/AlN passivation stack with epitaxial AlN grown on AlGaN/GaN heterojunctions by plasma-enhanced atomic layer deposition
2	Toward reliable MIS- and MOS-gate structures for GaN lateral power devices
3	600 V High-Performance AlGaN/GaN HEMTs with AlN/SiN_x Passivation
4	AlN passivation by plasma-enhanced atomic layer deposition for GaN-based power switches and power amplifiers
5	AC-Capacitance Techniques for Interface Trap Analysis in GaN-Based Buried-Channel MIS-HEMTs
6	650-V Double-Channel Lateral Schottky Barrier Diode With Dual-Recess Gated Anode
7	Improved Gate Dielectric Deposition and Enhanced Electrical Stability for Single-Layer MoS₂ MOSFET with an AlN Interfacial Layer
8	Effects of interface oxidation on the transport behavior of the two-dimensional-electron-gas in AlGaN/GaN heterostructures by plasma-enhanced-atomic-layer-deposited AlN passivation
9	Efficiency enhancement of InGaN/GaN blue light-emitting diodes with top surface deposition of AlN/Al₂O₃
10	Compatibility of AlN/SiN_x Passivation With LPCVD-SiN_x Gate Dielectric in GaN-Based MIS-HEMT
11	ALD-grown Ultrathin AlN Film for Passivation of AlGaN/GaN HEMTs
12	Compatibility of AlN/SiN_x Passivation Technique with High-Temperature Process
13	Plasma-Enhanced Atomic Layer Deposition of AlN Epitaxial Thin Film for AlN/GaN Heterostructure TFTs