Paul C. McIntyre Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Paul C. McIntyre returned 7 record(s).

Number	Title
1	Oxide Charge Engineering of Atomic Layer Deposited AlO_xN_y/Al₂O₃ Gate Dielectrics: A Path to Enhancement Mode GaN Devices
2	The influence of surface preparation on low temperature HfO₂ ALD on InGaAs (001) and (110) surfaces
3	Nanocrystallite Seeding of Metastable Ferroelectric Phase Formation in Atomic Layer-Deposited Hafnia-Zirconia Alloys
4	High temperature phase transformation of tantalum nitride films deposited by plasma enhanced atomic layer deposition for gate electrode applications
5	Engineering Interfacial Silicon Dioxide for Improved Metal-Insulator-Semiconductor Silicon Photoanode Water Splitting Performance
6	Nitride passivation of the interface between high-k dielectrics and SiGe
7	CeO₂ Doping of Hf_0.5Zr_0.5O₂ Thin Films for High Endurance Ferroelectric Memories