Sven Van den Berghe Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sven Van den Berghe returned 7 record(s).

Number	Title
1	Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
2	Ru thin film grown on TaN by plasma enhanced atomic layer deposition
3	Growth Kinetics and Crystallization Behavior of TiO₂ Films Prepared by Plasma Enhanced Atomic Layer Deposition
4	Diffusion barrier properties of TaN_x films prepared by plasma enhanced atomic layer deposition from PDMAT with N₂ or NH₃ plasma
5	Atomic layer deposition of titanium nitride from TDMAT precursor
6	Controllable nitrogen doping in as deposited TiO₂ film and its effect on post deposition annealing
7	Texture of atomic layer deposited ruthenium