Ronald L. Van Meirhaeghe Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ronald L. Van Meirhaeghe returned 8 record(s).

Number	Title
1	Ru thin film grown on TaN by plasma enhanced atomic layer deposition
2	Texture of atomic layer deposited ruthenium
3	Atomic layer deposition of titanium nitride from TDMAT precursor
4	Conformality of Al₂O₃ and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
5	TaCN growth with PDMAT and H₂/Ar plasma by plasma enhanced atomic layer deposition
6	Diffusion barrier properties of TaN_x films prepared by plasma enhanced atomic layer deposition from PDMAT with N₂ or NH₃ plasma
7	Growth Kinetics and Crystallization Behavior of TiO₂ Films Prepared by Plasma Enhanced Atomic Layer Deposition
8	Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide