Kyle Bothe Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kyle Bothe returned 7 record(s).

Number	Title
1	Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices
2	Impact of Post Fabrication Annealing PEALD ZrO₂ for GaN MOSFETs
3	High Mobility (210cm²/Vs), High Capacitance (7.2uF/cm²) ZrO₂ on GaN Metal Oxide Semiconductor Capacitor via ALD
4	ZrO₂ on GaN metal oxide semiconductor capacitors via plasma assisted atomic layer deposition
5	Electrical Comparison of HfO₂ and ZrO₂ Gate Dielectrics on GaN
6	Engineered Tunneling Contacts with Low-Temperature Atomic Layer Deposition of AlN on GaN
7	Polarization charge properties of low-temperature atomic layer deposition of AlN on GaN