Aixtron Genus Stratagem 200 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Aixtron Genus Stratagem 200 hardware returned 7 records.

Number	Title
1	Plasma Enhanced Atomic Layer Deposition of Plasmonic TiN Ultrathin Films Using TDMATi and NH₃
2	Characterization of Ultrathin PEALD-Grown RuCo Films for Diffusion Barrier and Copper Direct-Plate Applications
3	Atomic Layer Deposition of Aluminum Nitride Thin films from Trimethyl Aluminum (TMA) and Ammonia
4	Epitaxially grown crystalline Al₂O₃ interlayer on β-Ga₂O₃ (010) and its suppressed interface state density
5	Emerging Atomic Layer Deposition (ALD) Processes For Low Thermal Budget Flexible Electronics
6	Plasma-Assisted Atomic Layer Deposition of Conductive Hafnium Nitride Using Tetrakis(ethylmethylamino)hafnium for CMOS Gate Electrode Applications
7	Development of plasma-enhanced atomic layer deposition grown Ru-WCN mixed phase films for nanoscale diffusion barrier and copper direct-plate applications