Damage, Defects Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Damage, Defects returned 15 record(s).

Number	Title
1	Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
2	High-Reflective Coatings For Ground and Space Based Applications
3	Atomic-scale characterization of plasma-induced damage in plasma-enhanced atomic layer deposition
4	PEALD of SiO₂ and Al₂O₃ Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads
5	Mechanical properties of thin-film Parylene-metal-Parylene devices
6	Molybdenum Disulfide Catalytic Coatings via Atomic Layer Deposition for Solar Hydrogen Production from Copper Gallium Diselenide Photocathodes
7	Influence of PE-ALD of GaP on the Silicon Wafers Quality
8	A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD
9	Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO₂ Films Grown by the Plasma-Assisted Atomic Layer Deposition
10	Capacitance characterization of GaP/n-Si structures grown by PE-ALD
11	Using top graphene layer as sacrificial protection during dielectric atomic layer deposition
12	Plasma-Enhanced Atomic Layer Deposition of Al₂O₃ on Graphene Using Monolayer hBN as Interfacial Layer
13	Study of GaP/Si Heterojunction Solar Cells
14	Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
15	Comparative study of thermal and plasma enhanced atomic layer deposition of aluminum oxide on graphene