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The Plasma Enhanced Atomic Layer Deposition Publication Database is developed and maintained by Plasma ALD, LLC, a developer and supplier of inductively coupled plasma (ICP) sources for plasma-enhanced atomic layer deposition (PEALD), atomic layer etch (ALE), thin-film etching, surface cleaning, surface modification, and research plasma systems.

Our ICP sources are designed for integration with existing ALD and vacuum-processing equipment. Plasma ALD also provides plasma-source integration, process-development, and troubleshooting assistance based on decades of experience with low-pressure plasma processing and PEALD systems.

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Molybdenum Disulfide Catalytic Coatings via Atomic Layer Deposition for Solar Hydrogen Production from Copper Gallium Diselenide Photocathodes

Type:
Journal
Info:
ACS Appl. Energy Mater. 2019, 2, 2, 1060-1066
Date:
2019-01-07

Author Information

Name Institution
Thomas R. HellsternStanford University
David W. PalmStanford University
James CarterUniversity of Nevada - Las Vegas (UNLV)
Alex D. DeAngelisUniversity of Hawaii at Manoa
Kimberly HorsleyUniversity of Hawaii at Manoa
Lothar WeinhardtKarlsruhe Institute of Technology (KIT)
Wanli YangStanford University
Monika BlumUniversity of Nevada - Las Vegas (UNLV)
Nicolas GaillardUniversity of Hawaii at Manoa
Clemens HeskeKarlsruhe Institute of Technology (KIT)
Thomas F. JaramilloStanford University

Films

Plasma MoOx


Film/Plasma Properties

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Transmittance
Analysis: UV-VIS Spectroscopy

Characteristic: Optical Absorption
Analysis: UV-VIS Spectroscopy

Characteristic: Photoelectrochemical (PEC) Activity
Analysis: CV, Cyclic Voltammetry

Characteristic: Damage, Defects
Analysis: Linear Sweep Voltammetry

Substrates

TiO2

Notes

1504