Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Wear Rate Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Wear Rate returned 6 record(s).

NumberTitle
1Plasma-enhanced atomic layer deposition of vanadium nitride
2Plasma-enhanced atomic layer deposition of titanium vanadium nitride
3Tribological properties of thin films made by atomic layer deposition sliding against silicon
4Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure
5Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films
6Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films