Hardness Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Hardness returned 7 record(s).

Number	Title
1	Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution
2	Highly reflective polymeric substrates functionalized utilizing atomic layer deposition
3	TiN/AlN Nano Multilayers Film Fabricated by Plasma Enhanced Atomic Layer Deposition
4	Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
5	Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
6	Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating
7	Tribological properties of thin films made by atomic layer deposition sliding against silicon