Thermal Stability Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Thermal Stability returned 13 record(s).

Number	Title
1	A comparison between remote plasma-enhanced and thermal ALD of Hafnium-nitride thin films
2	Plasma-Assisted Atomic Layer Deposition of Conductive Hafnium Nitride Using Tetrakis(ethylmethylamino)hafnium for CMOS Gate Electrode Applications
3	The physical properties of cubic plasma-enhanced atomic layer deposition TaN films
4	Hydrogen induced passivation of Si interfaces by Al₂O₃ films and SiO₂/Al₂O₃ stacks
5	Plasma-enhanced atomic layer deposition of amorphous Ru-Si-N thin film as a diffusion barrier of direct plating of Cu
6	Plasma activation and atomic layer deposition of TiO₂ on polypropylene membranes for improved performances of lithium-ion batteries
7	Correlation of carbon content with the thermal stability of ruthenium deposited by using RF-direct plasma-enhanced atomic-layer deposition
8	Enhanced Methanol Oxidation with Annealed Atomic Layer Deposited Platinum Nanoparticles on Carbon Nanotubes
9	Ru thin film grown on TaN by plasma enhanced atomic layer deposition
10	Plasma enhanced atomic layer deposition of HfO₂ and ZrO₂ high-k thin films
11	Enhanced Dielectric Properties of SrTiO₃ Films with a SrRuO₃ Seed by Plasma-Enhanced Atomic Layer Deposition
12	Flexible insulator of hollow SiO₂ spheres and polyimide hybrid for flexible OLED