OES Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing OES returned 8 record(s).

Number	Title
1	Modeling of positional plasma characteristics by inserting body tube of optical emission spectroscopy for plasma assisted atomic layer deposition system
2	Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
3	Plasma enhanced atomic layer deposition of HfO₂ and ZrO₂ high-k thin films
4	Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
5	Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
6	Redeposition in plasma-assisted atomic layer deposition: Silicon nitride film quality ruled by the gas residence time
7	A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
8	Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth