Modeling of positional plasma characteristics by inserting body tube of optical emission spectroscopy for plasma assisted atomic layer deposition system
Type:
Conference Proceedings
Info:
2015 International Conference on Electronics Packaging and iMAPS All Asia Conference (ICEP-IACC)
Date:
2015-04-14
Author Information
| Name | Institution |
|---|---|
| In Joong Kim | Yonsei University |
| Yong Hyeon Shin | Yonsei University |
| Ilgu Yun | Yonsei University |
Films
Film/Plasma Properties
Characteristic: OES
Analysis: OES, Optical Emission Spectroscopy
Substrates
| Si(100) |
Notes
| 508 |