Ion Energy Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ion Energy returned 13 record(s).

Number	Title
1	Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
2	Plasma-enhanced atomic layer deposition: Correlating O₂ plasma parameters and species to blister formation and conformal film growth
3	Evidence for low-energy ions influencing plasma-assisted atomic layer deposition of SiO₂: Impact on the growth per cycle and wet etch rate
4	Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
5	Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO₂ Thin Films
6	Ion energy control and its applicability to plasma enhanced atomic layer deposition for synthesizing titanium dioxide films
7	Low-energy high-flux ion bombardment-induced interfacial mixing during Al₂O₃ plasma-enhanced atomic layer deposition
8	Innovative remote plasma source for atomic layer deposition for GaN devices
9	Plasma-Assisted ALD of Highly Conductive HfN_x: On the Effect of Energetic Ions on Film Microstructure
10	The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
11	Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
12	Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
13	Control of ion-flux and ion-energy in direct inductively coupled plasma reactor for interfacial-mixing plasma-enhanced atomic layer deposition