Ion Flux Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ion Flux returned 10 record(s).

Number	Title
1	Innovative remote plasma source for atomic layer deposition for GaN devices
2	Low-energy high-flux ion bombardment-induced interfacial mixing during Al₂O₃ plasma-enhanced atomic layer deposition
3	Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
4	Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
5	Enhanced interfacial reaction of precursor and low temperature substrate in HfO₂ atomic layer deposition with highly Ar diluted O₂ plasma
6	Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
7	Control of ion-flux and ion-energy in direct inductively coupled plasma reactor for interfacial-mixing plasma-enhanced atomic layer deposition
8	Uniformity of HfO₂ Thin Films Prepared on Trench Structures via Plasma-Enhanced Atomic Layer Deposition
9	The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
10	Si atomic layer epitaxy based on Si₂H₆ and remote He plasma bombardment