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A study on the growth mechanism and gas diffusion barrier property of homogeneously mixed silicon-tin oxide by atomic layer deposition

Type:
Journal
Info:
Ceramics International 47 (2021) 34774-34782
Date:
2021-09-02
DOI:
https://doi.org/10.1016/j.ceramint.2021.09.016

Author Information

Name Institution
Ju-Hwan HanHanyang University
Dong-Yeon KimHanyang University
Seung-Hwan LeeHanyang University
Hae Lin YangHanyang University
Byung Ho ParkEMNI Co., Ltd.
Jin-Seong ParkHanyang University

Films

Plasma SiO2

Hardware used: Custom Direct Capacitively Coupled Plasma
Di(isopropylamino)Silane, (i-PrHN)2SiH2, DIPAS
CAS#: 908831-34-5
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 100C

Plasma SnO2

Hardware used: Custom Direct Capacitively Coupled Plasma
TDMASn, (Me2N)4Sn, [(CH3)2N]4Sn, Tetrakis(DiMethylAmido) Tin, Tin Dimethylamide
CAS#: 1066-77-9
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 100C

Plasma SiSnOx

Hardware used: Custom Direct Capacitively Coupled Plasma
Di(isopropylamino)Silane, (i-PrHN)2SiH2, DIPAS
CAS#: 908831-34-5
TDMASn, (Me2N)4Sn, [(CH3)2N]4Sn, Tetrakis(DiMethylAmido) Tin, Tin Dimethylamide
CAS#: 1066-77-9
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 100C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: Ellipso Technology, UV-FM8

Characteristic: Refractive Index
Analysis: Ellipsometry
Diagnostic: Ellipso Technology, UV-FM8

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: Rigaku Smartlab

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Rigaku Smartlab

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo VG-Scientific theta probe

Characteristic: Bonding States
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo VG-Scientific theta probe

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Diagnostic: JEOL 2100F

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: JEOL 2100F

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: Park Systems, XE-100

Characteristic: Transmittance
Analysis: UV-VIS Spectroscopy
Diagnostic: Shimadzu UV-2600

Characteristic: Water Vapor Transmission Rate (WVTR)
Analysis: Calcium Test
Diagnostic: Custom

Substrates

Silicon
PEN, Polyethylene Napthalate

Notes

Used one of many available ISAC Research Inc. PEALD systems.
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