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Ni80Fe20 nanotubes with optimized spintronic functionalities prepared by atomic layer deposition

Type:
Journal
Info:
Nanoscale, 2021, 13, 13451
Date:
2021-06-22
DOI:
http://dx.doi.org/10.1039/D1NR02291A

Author Information

Name Institution
Maria Carmen GiordanoÉcole Polytechnique Fédérale de Lausanne (EPFL)
Simon Escobar SteinvallÉcole Polytechnique Fédérale de Lausanne (EPFL)
Sho WatanabeÉcole Polytechnique Fédérale de Lausanne (EPFL)
Anna Fontcuberta i MorralÉcole Polytechnique Fédérale de Lausanne (EPFL)
Dirk GrundlerÉcole Polytechnique Fédérale de Lausanne (EPFL)

Films

Other NiFe

Hardware used: Beneq TFS-200
Bis(cyclopentadienyl)nickel, Nickelocene, Cp2Ni
CAS#: 1271-28-9
Iron(III) t-butoxide, [Fe(OtBu)3]2
CAS#: 620945-29-1
H2O, Water
CAS#: 7732-18-5
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature = 170C

Film/Plasma Properties

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: -

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: -

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: Zeiss Merlin

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: PANalytical Empyrean

Characteristic: Morphology, Roughness, Topography
Analysis: TEM, Transmission Electron Microscope
Diagnostic: FEI Talos F200X

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: FEI Talos F200X

Characteristic: Magnetic Properties
Analysis: VSM, Vibrating Sample Magnetometer
Diagnostic: Microsense EZ-7

Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Diagnostic: Tencor

Characteristic: Magnetic Properties
Analysis: van der Pauw sheet resistance
Diagnostic: Custom

Substrates

Si(100)
GaAs
Nanowire

Notes

1608