Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Simon Escobar Steinvall Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Simon Escobar Steinvall returned 2 record(s).

NumberTitle
1Ni80Fe20 nanotubes with optimized spintronic functionalities prepared by atomic layer deposition
2Plasma-Enhanced Atomic Layer Deposition of Nickel Nanotubes with Low Resistivity and Coherent Magnetization Dynamics for 3D Spintronics