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Plasma-Enhanced Atomic Layer Deposition of Nickel Nanotubes with Low Resistivity and Coherent Magnetization Dynamics for 3D Spintronics

Type:
Journal
Info:
ACS Appl. Mater. Interfaces, 2020, 12 (36), pp 40443-40452
Date:
2020-08-12
DOI:
http://dx.doi.org/10.1021/acsami.0c06879

Author Information

Name Institution
Maria Carmen GiordanoÉcole Polytechnique Fédérale de Lausanne (EPFL)
Korbinian BaumgaertlÉcole Polytechnique Fédérale de Lausanne (EPFL)
Simon Escobar SteinvallÉcole Polytechnique Fédérale de Lausanne (EPFL)
J. GayÉcole Polytechnique Fédérale de Lausanne (EPFL)
M. VuichardÉcole Polytechnique Fédérale de Lausanne (EPFL)
Anna Fontcuberta i MorralÉcole Polytechnique Fédérale de Lausanne (EPFL)
Dirk GrundlerÉcole Polytechnique Fédérale de Lausanne (EPFL)

Films

Plasma Ni

Hardware used: Beneq TFS-200
Bis(cyclopentadienyl)nickel, Nickelocene, Cp2Ni
CAS#: 1271-28-9
H2O, Water
CAS#: 7732-18-5
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature Range = 155-175C

Film/Plasma Properties

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Talos F200X

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Talos F200X

Characteristic: Conformality, Step Coverage
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Talos F200X

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: -

Characteristic: Morphology, Roughness, Topography
Analysis: TEM, Transmission Electron Microscope
Diagnostic: FEI Talos F200X

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: PANalytical Empyrean

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: FEI Talos F200X

Characteristic: Magnetic Properties
Analysis: SQUID, Superconducting Quantum Interference Device
Diagnostic: Quantum Design MPMS

Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Diagnostic: KLA-Tencor RS100

Characteristic: Magnetization
Analysis: van der Pauw sheet resistance
Diagnostic: KLA-Tencor RS100

Substrates

Al2O3

Notes

1507