Thierry Conard Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Thierry Conard returned 5 record(s).

Number	Title
1	Engineering high quality and conformal ultrathin SiN_x films by PEALD for downscaled and advanced CMOS nodes
2	Low temperature deposition of 2D WS₂ layers from WF₆ and H₂S precursors: impact of reducing agents
3	Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS₂ from WF₆, H₂ Plasma, and H₂S
4	Nucleation mechanism during WS₂ plasma enhanced atomic layer deposition on amorphous Al₂O₃ and sapphire substrates
5	Understanding the EOT-J_g degradation in Ru/SrTiO_x/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition