Sang-Joon Park Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sang-Joon Park returned 4 record(s).

Number	Title
1	Atomic layer deposition of Ta-based thin films: Reactions of alkylamide precursor with various reactants
2	Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
3	Atomic Layer Deposition of Ruthenium and Ruthenium-oxide Thin Films by Using a Ru(EtCp)2 Precursor and Oxygen Gas
4	In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices