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E. Langereis Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by E. Langereis returned 14 record(s).

NumberTitle
1Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
2Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
3In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
4Synthesis and in situ characterization of low-resistivity TaNx films by remote plasma atomic layer deposition
5Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
6Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
7Surface chemistry of plasma-assisted atomic layer deposition of Al2O3 studied by infrared spectroscopy
8In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition
9Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors
10Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers
11Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
12Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
13Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al2O3
14Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications