E. Langereis Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by E. Langereis returned 14 record(s).

Number	Title
1	Synthesis and in situ characterization of low-resistivity TaN_x films by remote plasma atomic layer deposition
2	Plasma-assisted atomic layer deposition of Al₂O₃ moisture permeation barriers on polymers
3	In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al₂O₃
4	Reaction mechanisms of atomic layer deposition of TaN_x from Ta(NMe₂)₅ precursor and H₂-based plasmas
5	Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
6	Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
7	Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
8	Atomic layer deposition of Ru from CpRu(CO)₂Et using O₂ gas and O₂ plasma
9	Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
10	Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
11	Surface chemistry of plasma-assisted atomic layer deposition of Al₂O₃ studied by infrared spectroscopy
12	In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition
13	Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al₂O₃
14	Remote Plasma ALD of SrTiO₃ Using Cyclopentadienlyl-Based Ti and Sr Precursors