Ivona Z. Mitrovic Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ivona Z. Mitrovic returned 4 record(s).

Number	Title
1	Low EOT GeO2/Al2O3/HfO2 on Ge substrate using ultrathin Al deposition
2	Hafnia and alumina on sulphur passivated germanium
3	A high speed PE-ALD ZnO Schottky diode rectifier with low interface-state density
4	Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition