Dennis M. Hausmann Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Dennis M. Hausmann returned 6 record(s).

Number	Title
1	Atomic layer deposition of silicon-based dielectrics for semiconductor manufacturing: Current status and future outlook
2	Surface reactions of aminosilane precursors during N₂ plasma-assisted atomic layer deposition of SiN_x
3	Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
4	Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics
5	Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(sec-butylamino)silane and N₂ Plasma on Planar and 3D Substrate Topographies
6	Low-Temperature Conformal Atomic Layer Deposition of SiN_x Films Using Si₂Cl₆ and NH₃ Plasma