Seong-Jun Jeong Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Seong-Jun Jeong returned 4 record(s).

Number	Title
1	Improvement of Copper Diffusion Barrier Properties of Tantalum Nitride Films by Incorporating Ruthenium Using PEALD
2	Plasma-enhanced atomic layer deposition of Ir thin films for copper adhesion layer
3	Improved Oxygen Diffusion Barrier Properties of Ruthenium-Titanium Nitride Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
4	Improvement of Morphological Stability of PEALD-Iridium Thin Films by Adopting Two-Step Annealing Process