Scooter D. Johnson Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Scooter D. Johnson returned 5 record(s).

Number	Title
1	Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
2	Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods
3	Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering
4	Understanding the effect of nitrogen plasma exposure on plasma assisted atomic layer epitaxy of InN monitored by real time grazing incidence small angle x-ray scattering
5	Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy