Steven Marcus Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Steven Marcus returned 4 record(s).

Number	Title
1	Atomic Layer Deposition: An Enabling Technology for Microelectronic Device Manufacturing
2	Nanochemistry, nanostructure, and electrical properties of Ta₂O₅ film deposited by atomic layer deposition and plasma-enhanced atomic layer deposition
3	Film Uniformity in Atomic Layer Deposition
4	TiCl₄ as a Precursor in the TiN Deposition by ALD and PEALD