Steven Marcus Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Steven Marcus returned 4 record(s).

Number	Title
1	Nanochemistry, nanostructure, and electrical properties of Ta₂O₅ film deposited by atomic layer deposition and plasma-enhanced atomic layer deposition
2	TiCl₄ as a Precursor in the TiN Deposition by ALD and PEALD
3	Atomic Layer Deposition: An Enabling Technology for Microelectronic Device Manufacturing
4	Film Uniformity in Atomic Layer Deposition