Shigeru Kubota Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Shigeru Kubota returned 13 record(s).

Number	Title
1	RT Atomic Layer Deposition of Al₂O₃ By Using Remote Plasma Excited Water Vapor
2	Fundamental reaction of RT gallium oxide atomic layer deposition investigated by IR absorption spectroscopy
3	RT Atomic Layer Deposition of ZrO₂ By Using Plasma Excited Water Vapor
4	Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy
5	RT Ga₂O₃ atomic layer deposition by using trimethylgallium and water-oxygen plasma
6	Temperature-controlled atomic layer deposition of GaN using plasma-excited nitrogen source
7	Growth kinetics for temperature-controlled atomic layer deposition of GaN using trimethylgallium and remote-plasma-excited NH₃
8	Infrared Study of Room Temperature Atomic Layer Deposition of SnO₂ Using Sn(CH₃)₄ and Plasma Excited Humidified Argon
9	Room-temperature atomic layer deposition of ZrO₂ using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon
10	Room temperature atomic layer deposition of TiO₂ on gold nanoparticles
11	Infrared study on low temperature atomic layer deposition of GaN using trimethylgallium and plasma-excited ammonia
12	Room-temperature plasma enhanced atomic layer deposition of aluminum silicate and its application in dye-sensitized solar cells
13	Reaction mechanism of room temperature HfO₂ atomic layer deposition using remote plasma excited water and oxygen