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Shigeru Kubota Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Shigeru Kubota returned 13 record(s).

NumberTitle
1Temperature-controlled atomic layer deposition of GaN using plasma-excited nitrogen source
2Growth kinetics for temperature-controlled atomic layer deposition of GaN using trimethylgallium and remote-plasma-excited NH3
3Reaction mechanism of room temperature HfO2 atomic layer deposition using remote plasma excited water and oxygen
4Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy
5RT Atomic Layer Deposition of ZrO2 By Using Plasma Excited Water Vapor
6Infrared study on low temperature atomic layer deposition of GaN using trimethylgallium and plasma-excited ammonia
7Fundamental reaction of RT gallium oxide atomic layer deposition investigated by IR absorption spectroscopy
8RT Ga2O3 atomic layer deposition by using trimethylgallium and water-oxygen plasma
9Room-temperature plasma enhanced atomic layer deposition of aluminum silicate and its application in dye-sensitized solar cells
10Infrared Study of Room Temperature Atomic Layer Deposition of SnO2 Using Sn(CH3)4 and Plasma Excited Humidified Argon
11Room temperature atomic layer deposition of TiO2 on gold nanoparticles
12Room-temperature atomic layer deposition of ZrO2 using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon
13RT Atomic Layer Deposition of Al2O3 By Using Remote Plasma Excited Water Vapor