Virginia R. Anderson Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Virginia R. Anderson returned 6 record(s).

Number	Title
1	Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods
2	Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
3	Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
4	Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering
5	Atomic layer epitaxy for quantum well nitride-based devices
6	Understanding the effect of nitrogen plasma exposure on plasma assisted atomic layer epitaxy of InN monitored by real time grazing incidence small angle x-ray scattering