Tae Eun Hong Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Tae Eun Hong returned 4 record(s).

Number	Title
1	Atomic layer deposited self-forming Ru-Mn diffusion barrier for seedless Cu interconnects
2	Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu
3	Atomic layer deposition of WN_x thin films using a F-free tungsten metal-organic precursor and NH₃ plasma as a Cu-diffusion barrier
4	A controlled growth of WN_x and WC_x thin films prepared by atomic layer deposition