Clement Lansalot-Matras Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Clement Lansalot-Matras returned 7 record(s).

Number	Title
1	Ultra-Low Temperature Deposition of Copper Seed Layers by PEALD
2	Layer-Controlled, Wafer-Scale, and Conformal Synthesis of Tungsten Disulfide Nanosheets Using Atomic Layer Deposition
3	Plasma-Enhanced Atomic Layer Deposition of Cobalt Using Cyclopentadienyl Isopropyl Acetamidinato-Cobalt as a Precursor
4	Controllable synthesis of molybdenum tungsten disulfide alloy for vertically composition-controlled multilayer
5	Effects of Cl-Based Ligand Structures on Atomic Layer Deposited HfO₂
6	PEALD of Copper using New Precursors for Next Generation of Interconnections
7	Growth characteristics and electrical properties of SiO₂ thin films prepared using plasma-enhanced atomic layer deposition and chemical vapor deposition with an aminosilane precursor