R. Waser Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by R. Waser returned 4 record(s).

Number	Title
1	Impact of composition and crystallization behavior of atomic layer deposited strontium titanate films on the resistive switching of Pt/STO/TiN devices
2	Energy dissipation during pulsed switching of strontium-titanate based resistive switching memory devices
3	Forming-free metal-oxide ReRAM by oxygen ion implantation process
4	Influence of stoichiometry on the performance of MIM capacitors from plasma-assisted ALD SrxTiyOz films