Seok-Jun Won Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Seok-Jun Won returned 5 record(s).

Number	Title
1	Plasma-Enhanced Atomic Layer Deposition of TiO₂ and Al-Doped TiO₂ Films Using N₂O and O₂ Reactants
2	The Formation of an Almost Full Atomic Monolayer via Surface Modification by N₂O-Plasma in Atomic Layer Deposition of ZrO₂ Thin Films
3	High-Quality Low-Temperature Silicon Oxide by Plasma-Enhanced Atomic Layer Deposition Using a Metal-Organic Silicon Precursor and Oxygen Radical
4	Substrate Dependent Growth Rate of Plasma-Enhanced Atomic Layer Deposition of Titanium Oxide Using N₂O Gas
5	Low Temperature Formation of Silicon Oxide Thin Films by Atomic Layer Deposition Using NH₃/O₂ Plasma