Steve Hall Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Steve Hall returned 4 record(s).

Number	Title
1	Hafnia and alumina on sulphur passivated germanium
2	A high speed PE-ALD ZnO Schottky diode rectifier with low interface-state density
3	Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
4	Low EOT GeO₂/Al₂O₃/HfO₂ on Ge substrate using ultrathin Al deposition