Sun Jin Yun Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sun Jin Yun returned 15 record(s).

Number	Title
1	Optical and Electrical Properties of Ti_xSi_1-xO_y Films
2	PEALD of Zirconium Oxide Using Tetrakis(ethylmethylamino)zirconium and Oxygen
3	Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition
4	Characteristics of TiO₂ Films Prepared by ALD With and Without Plasma
5	Electrical Properties of Alumina Films by Plasma-Enhanced Atomic Layer Deposition
6	Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition
7	Improved stability of electrical properties of nitrogen-added Al₂O₃ films grown by PEALD as gate dielectric
8	Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition
9	Low-Temperature Growth of SiO₂ Films by Plasma-Enhanced Atomic Layer Deposition
10	Pentacene-Thin Film Transistors with ZrO₂ Gate Dielectric Layers Deposited by Plasma-Enhanced Atomic Layer Deposition
11	Investigation of a Two-Layer Gate Insulator Using Plasma-Enhanced ALD for Ultralow Temperature Poly-Si TFTs
12	Passivation of organic light-emitting diodes with aluminum oxide thin films grown by plasma-enhanced atomic layer deposition
13	Optical and Electrical Properties of Al_xTi_1-xO Films
14	Characterization of AlON-TiON Stacked Insulators For ZnS:Mn Thin Film Electroluminescent Devices
15	Characteristics of Al_xTi_1-xO_y Films Grown by Plasma-Enhanced Atomic Layer Deposition