Sun Jin Yun Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sun Jin Yun returned 15 record(s).

Number	Title
1	Characterization of AlON-TiON Stacked Insulators For ZnS:Mn Thin Film Electroluminescent Devices
2	Pentacene-Thin Film Transistors with ZrO₂ Gate Dielectric Layers Deposited by Plasma-Enhanced Atomic Layer Deposition
3	Electrical Properties of Alumina Films by Plasma-Enhanced Atomic Layer Deposition
4	Characteristics of Al_xTi_1-xO_y Films Grown by Plasma-Enhanced Atomic Layer Deposition
5	Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition
6	Optical and Electrical Properties of Al_xTi_1-xO Films
7	Optical and Electrical Properties of Ti_xSi_1-xO_y Films
8	PEALD of Zirconium Oxide Using Tetrakis(ethylmethylamino)zirconium and Oxygen
9	Characteristics of TiO₂ Films Prepared by ALD With and Without Plasma
10	Investigation of a Two-Layer Gate Insulator Using Plasma-Enhanced ALD for Ultralow Temperature Poly-Si TFTs
11	Passivation of organic light-emitting diodes with aluminum oxide thin films grown by plasma-enhanced atomic layer deposition
12	Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition
13	Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition
14	Improved stability of electrical properties of nitrogen-added Al₂O₃ films grown by PEALD as gate dielectric
15	Low-Temperature Growth of SiO₂ Films by Plasma-Enhanced Atomic Layer Deposition