P. Pungboon Pansila Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by P. Pungboon Pansila returned 10 record(s).

Number	Title
1	Fundamental reaction of RT gallium oxide atomic layer deposition investigated by IR absorption spectroscopy
2	Temperature-controlled atomic layer deposition of GaN using plasma-excited nitrogen source
3	RT Atomic Layer Deposition of Al₂O₃ By Using Remote Plasma Excited Water Vapor
4	RT Atomic Layer Deposition of ZrO₂ By Using Plasma Excited Water Vapor
5	Room-temperature atomic layer deposition of ZrO₂ using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon
6	RT Ga₂O₃ atomic layer deposition by using trimethylgallium and water-oxygen plasma
7	Growth kinetics for temperature-controlled atomic layer deposition of GaN using trimethylgallium and remote-plasma-excited NH₃
8	Reaction mechanism of room temperature HfO₂ atomic layer deposition using remote plasma excited water and oxygen
9	Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy
10	Infrared study on low temperature atomic layer deposition of GaN using trimethylgallium and plasma-excited ammonia