Rafaiel A. Ovanesyan Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Rafaiel A. Ovanesyan returned 4 record(s).

Number	Title
1	Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics
2	Surface reactions of aminosilane precursors during N₂ plasma-assisted atomic layer deposition of SiN_x
3	Low-Temperature Conformal Atomic Layer Deposition of SiN_x Films Using Si₂Cl₆ and NH₃ Plasma
4	Atomic layer deposition of silicon-based dielectrics for semiconductor manufacturing: Current status and future outlook