Rémy Gassilloud Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Rémy Gassilloud returned 7 record(s).

Number	Title
1	Low temperature Topographically Selective Deposition by Plasma Enhanced Atomic Layer Deposition with ion bombardment assistance
2	Topographical selective deposition: A comparison between plasma-enhanced atomic layer deposition/sputtering and plasma-enhanced atomic layer deposition/quasi-atomic layer etching approaches
3	Area selective deposition of TiO₂ by intercalation of plasma etching cycles in PEALD process: A bottom up approach for the simplification of 3D integration scheme
4	Selective deposition of Ta₂O₅ by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps
5	Topographically selective deposition
6	Evaluation of plasma parameters on PEALD deposited TaCN
7	Interface and plasma damage analysis of PEALD TaCN deposited on HfO₂ for advanced CMOS studied by angle resolved XPS and C-V