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Fumihiko Hirose Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Fumihiko Hirose returned 13 record(s).

NumberTitle
1Fundamental reaction of RT gallium oxide atomic layer deposition investigated by IR absorption spectroscopy
2Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy
3Room temperature atomic layer deposition of TiO2 on gold nanoparticles
4Room-temperature atomic layer deposition of ZrO2 using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon
5Temperature-controlled atomic layer deposition of GaN using plasma-excited nitrogen source
6Infrared study on low temperature atomic layer deposition of GaN using trimethylgallium and plasma-excited ammonia
7Reaction mechanism of room temperature HfO2 atomic layer deposition using remote plasma excited water and oxygen
8Growth kinetics for temperature-controlled atomic layer deposition of GaN using trimethylgallium and remote-plasma-excited NH3
9Room-temperature plasma enhanced atomic layer deposition of aluminum silicate and its application in dye-sensitized solar cells
10RT Atomic Layer Deposition of ZrO2 By Using Plasma Excited Water Vapor
11RT Ga2O3 atomic layer deposition by using trimethylgallium and water-oxygen plasma
12RT Atomic Layer Deposition of Al2O3 By Using Remote Plasma Excited Water Vapor
13Infrared Study of Room Temperature Atomic Layer Deposition of SnO2 Using Sn(CH3)4 and Plasma Excited Humidified Argon