Il-Kwon Oh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Il-Kwon Oh returned 10 record(s).

Number	Title
1	Atomic-scale characterization of plasma-induced damage in plasma-enhanced atomic layer deposition
2	Growth characteristics and electrical properties of SiO₂ thin films prepared using plasma-enhanced atomic layer deposition and chemical vapor deposition with an aminosilane precursor
3	Comparative study on growth characteristics and electrical properties of ZrO₂ films grown using pulsed plasma-enhanced chemical vapor deposition and plasma-enhanced atomic layer deposition for oxide thin film transistors
4	Growth mechanism of Co thin films formed by plasma-enhanced atomic layer deposition using NH₃ as plasma reactant
5	In situ surface cleaning on a Ge substrate using TMA and MgCp₂ for HfO₂-based gate oxides
6	Very high frequency plasma reactant for atomic layer deposition
7	Growth mechanism and electrical properties of tungsten films deposited by plasma-enhanced atomic layer deposition with chloride and metal organic precursors
8	Characterization of HfO_xN_y thin film formation by in-situ plasma enhanced atomic layer deposition using NH₃ and N₂ plasmas
9	Effects of Cl-Based Ligand Structures on Atomic Layer Deposited HfO₂
10	Hydrophobicity of Rare Earth Oxides Grown by Atomic Layer Deposition