Alexei P. Orlov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexei P. Orlov returned 5 record(s).

Number	Title
1	Experimental demonstration of single electron transistors featuring SiO₂ plasma-enhanced atomic layer deposition in Ni-SiO₂-Ni tunnel junctions
2	Fabrication of nanodamascene metallic single electron transistors with atomic layer deposition of tunnel barrier
3	Single-electron transistors featuring silicon nitride tunnel barriers prepared by atomic layer deposition
4	Dielectric properties investigation of a compound based on atomic layer deposited multi-layer structure
5	Metal-Insulator-Metal Single Electron Transistors with Tunnel Barriers Prepared by Atomic Layer Deposition