Ho-Young Cha Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ho-Young Cha returned 7 record(s).

Number	Title
1	High-performance normally off AlGaN/GaN-on-Si HEMTs with partially recessed SiN_x MIS structure
2	Normally-off AlGaN/GaN-on-Si metal-insulator-semiconductor heterojunction field-effect transistor with nitrogen-incorporated silicon oxide gate insulator
3	High-Voltage and Low-Leakage-Current Gate Recessed Normally-Off GaN MIS-HEMTs With Dual Gate Insulator Employing PEALD-SiN_x/RF-Sputtered-HfO₂
4	Crystalline AlN Interfacial Layer on GaN Using Plasma-Enhanced Atomic Layer Deposition
5	Improvement of V_th Instability in Normally-Off GaN MIS-HEMTs Employing PEALD-SiN_x as an Interfacial Layer
6	Effects of Recessed-Gate Structure on AlGaN/GaN-on-SiC MIS-HEMTs with Thin AlO_xN_y MIS Gate
7	Impacts of conduction band offset and border traps on V_th instability of gate recessed normally-off GaN MIS-HEMTs