Vladamir Djara Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Vladamir Djara returned 5 record(s).

Number	Title
1	Structural and Electrical Analysis of Thin Interface Control Layers of MgO or Al₂O₃ Deposited by Atomic Layer Deposition and Incorporated at the high-k/III-V Interface of MO₂/In_xGa_1-xAs (M = Hf\|Zr, x = 0\|0.53) Gate Stacks
2	CMOS-compatible Replacement Metal Gate InGaAs-OI FinFET With ION= 156 μA/μm at VDD= 0.5 V and IOFF= 100 nA/μm
3	High aspect ratio iridescent three-dimensional metal-insulator-metal capacitors using atomic layer deposition
4	Tri-gate InGaAs-OI junctionless FETs with PE-ALD Al₂O₃ gate dielectric and H₂/Ar anneal
5	Low D_it HfO₂/Al₂O₃/In_0.53Ga_0.47As gate stack achieved with plasma-enhanced atomic layer deposition