Inductively coupled plasma sources from Plasma ALD, LLC.


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Michael A. Mastro Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Michael A. Mastro returned 4 record(s).

NumberTitle
1Practical Challenges of Processing III-Nitride/Graphene/SiC Devices
2Epitaxial growth of AlN films via plasma-assisted atomic layer epitaxy
3Perspectives on future directions in III-N semiconductor research
4Atomic layer epitaxy for quantum well nitride-based devices