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Jung Wook Lim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jung Wook Lim returned 16 record(s).

NumberTitle
1Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition
2Characteristics of AlxTi1-xOy Films Grown by Plasma-Enhanced Atomic Layer Deposition
3PEALD of Zirconium Oxide Using Tetrakis(ethylmethylamino)zirconium and Oxygen
4Optical and Electrical Properties of AlxTi1-xO Films
5Electrical Properties of Alumina Films by Plasma-Enhanced Atomic Layer Deposition
6Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition
7Investigation of a Two-Layer Gate Insulator Using Plasma-Enhanced ALD for Ultralow Temperature Poly-Si TFTs
8Stabilization of Al2O3 gate oxide on plastic substrate for low temperature poly-silicon by in situ plasma treatment
9Characteristics of TiO2 Films Prepared by ALD With and Without Plasma
10Passivation of organic light-emitting diodes with aluminum oxide thin films grown by plasma-enhanced atomic layer deposition
11Characterization of AlON-TiON Stacked Insulators For ZnS:Mn Thin Film Electroluminescent Devices
12Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition
13Improved stability of electrical properties of nitrogen-added Al2O3 films grown by PEALD as gate dielectric
14Optical and Electrical Properties of TixSi1-xOy Films
15Pentacene-Thin Film Transistors with ZrO2 Gate Dielectric Layers Deposited by Plasma-Enhanced Atomic Layer Deposition
16Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition