Jung Wook Lim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jung Wook Lim returned 16 record(s).

Number	Title
1	Stabilization of Al₂O₃ gate oxide on plastic substrate for low temperature poly-silicon by in situ plasma treatment
2	Characteristics of TiO₂ Films Prepared by ALD With and Without Plasma
3	Pentacene-Thin Film Transistors with ZrO₂ Gate Dielectric Layers Deposited by Plasma-Enhanced Atomic Layer Deposition
4	Electrical Properties of Alumina Films by Plasma-Enhanced Atomic Layer Deposition
5	Improved stability of electrical properties of nitrogen-added Al₂O₃ films grown by PEALD as gate dielectric
6	PEALD of Zirconium Oxide Using Tetrakis(ethylmethylamino)zirconium and Oxygen
7	Characteristics of Al_xTi_1-xO_y Films Grown by Plasma-Enhanced Atomic Layer Deposition
8	Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition
9	Optical and Electrical Properties of Ti_xSi_1-xO_y Films
10	Passivation of organic light-emitting diodes with aluminum oxide thin films grown by plasma-enhanced atomic layer deposition
11	Optical and Electrical Properties of Al_xTi_1-xO Films
12	Investigation of a Two-Layer Gate Insulator Using Plasma-Enhanced ALD for Ultralow Temperature Poly-Si TFTs
13	Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition
14	Characterization of AlON-TiON Stacked Insulators For ZnS:Mn Thin Film Electroluminescent Devices
15	Low-Temperature Growth of SiO₂ Films by Plasma-Enhanced Atomic Layer Deposition
16	Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition