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Jung Wook Lim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jung Wook Lim returned 16 record(s).

NumberTitle
1Stabilization of Al2O3 gate oxide on plastic substrate for low temperature poly-silicon by in situ plasma treatment
2Electrical Properties of Alumina Films by Plasma-Enhanced Atomic Layer Deposition
3Characteristics of AlxTi1-xOy Films Grown by Plasma-Enhanced Atomic Layer Deposition
4Investigation of a Two-Layer Gate Insulator Using Plasma-Enhanced ALD for Ultralow Temperature Poly-Si TFTs
5Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition
6Optical and Electrical Properties of TixSi1-xOy Films
7Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition
8Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition
9Improved stability of electrical properties of nitrogen-added Al2O3 films grown by PEALD as gate dielectric
10Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition
11Characteristics of TiO2 Films Prepared by ALD With and Without Plasma
12Passivation of organic light-emitting diodes with aluminum oxide thin films grown by plasma-enhanced atomic layer deposition
13PEALD of Zirconium Oxide Using Tetrakis(ethylmethylamino)zirconium and Oxygen
14Characterization of AlON-TiON Stacked Insulators For ZnS:Mn Thin Film Electroluminescent Devices
15Optical and Electrical Properties of AlxTi1-xO Films
16Pentacene-Thin Film Transistors with ZrO2 Gate Dielectric Layers Deposited by Plasma-Enhanced Atomic Layer Deposition