Robert M. Wallace Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Robert M. Wallace returned 5 record(s).

Number	Title
1	High-κ Dielectric on ReS₂: In-Situ Thermal Versus Plasma-Enhanced Atomic Layer Deposition of Al₂O₃
2	High quality HfO₂/p-GaSb(001) metal-oxide-semiconductor capacitors with 0.8nm equivalent oxide thickness
3	In situ plasma enhanced atomic layer deposition half cycle study of Al₂O₃ on AlGaN/GaN high electron mobility transistors
4	Fermi level unpinning of GaSb (100) using plasma enhanced atomic layer deposition of Al₂O₃
5	Spectroscopic and electrical calculation of band alignment between atomic layer deposited SiO₂ and β-Ga₂O₃ (2̅01)